US DoC accuses ASML of shipping EUV-compatible components to China

ASML says that none of its EUV machines are in China and it has never shipped an EUV machine to China.

ASML execs told DoC officials that UV machines require constant upkeep from ASM employees. ASML says there are 314 EU EUV machines in operation around the world and that any interruption of normal behaviour or loss of connectivity can be automatically detected by ASML.

Furthermore “customers cannot remove, transport and relocate EUV systems without ASML involvement due to specialised handling procedures.”

The US DoC says they have evidence of ASML shipping to specialty equipment to China which is used to transport EUV machines as well as other components that could be used in EUV systems.

ASML said: “ASML has never shipped an EUV machine to China nor have we shipped to China any component module or equipment specially designed to be used in an EUV machine.”

ASML is allowed to do business with SwaySure Technology of China which is a partner of Huawei. DoC officials indicated to Bloomberg they were concerned about the technological support provided to SwaySure.

Most of the $200-300 million low-NA EUV machines are in Taiwan with Korea the second biggest EUV buyer and the US third.

ASML shipped 48 EUV machines last year and plans to ship over 60 EUV units this year and 80 units in 2027. The 2027 shipment will include ten $380 million high-NA EUV scanners.

Currently 51% of the machines being shipped are configured for memory production as Samsung and Hynix expand HBM output. Korea is currently accounting for 45% of EUV revenue.